Ionic atomizer with counter-arranged targets

A. P. Eremin, V. D. Smolyaninov
Research Institute for Electrоn and Iоn Optics, Moscow, Russia

A. M. Filachev
The State Unitary Enterprise "RD&P Centеr "Orion"", Moscow, Russia

The characteristics and opportunities of magnetron ionic atomizer are considered.

Contents