A. L. Bondareva, G. I. Zmievskaya
Keldysh Institute of Applied Mathematics Russian Academy of Sciences, Moscow, Russia
Formation of vacancy-gas pores or bubbles is simulated as process of a defects clusterization during fluctuation stage of first-order phase transition, when metal or dielectric surface is irradiated by plasma. Cluster distributions as function versus cluster size and displacement into solids lattice are numerically received by stochastic analog method. Annealing role is examined.