Applied physics
N 4, 2002

PARTICULARITIES OF IR-RADIATION ABSORBING IN FINE POLYIMIDE STRUCTURES AND MICRO BOLOMETER DETECTOR ON THEIR BASE

А.А. Zhukov, А.Е. Zdobnikov, S.N.Klemin, V.V. Tarasov, L.А. Filatov, Yu.S. Chetverov.

ISC CSRI "CYCLONE", SUE SPE "PULSAR", Moscow, Russia

The absorption of IR-radiation 200-4000 cm-1 range of 0,65-1,9 micron thick polyimide thin-films with such functional coverings as titanium, silicon nitride, aluminium was investigated. The 1,3-1,4 micron thick polyimide structure have 85 % absorption of IR-radiation of  720 - 1250 cm-1 range. On the base of the developed polyimide thin-film technology linear micro bolometric array detectors were fabricated and investigated. Calculated value of the linear micro bolometer array detectivity is 4 .107 cm.Hz1/2.W-1.

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