Applied physics
No. 5, 2002

Surface wave plasma source

N. А. Аzarenkov, А. А. Bizyukov, А. V. Gаpon, А. F. Tseluyko, А. G. Chunadrа

Kharkov National University, Kharkov, Ukraine

D. L. Grekov

NSC "Kharkov Institute of Physics and Technology", Kharkov, Ukraine

The paper presents the first results of construction and operation of surface waves plasma source with large aperture. It allows to proceed the samples with diameter up to 30 cm. The calculations of electromagnetic fields in the device have established the base for antenna optimization.

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