Applied physics
N 3, 2003

The surface treating of thin polyimide films and coatings for the preparation of microbridge materials of non cooled microbolometers

A. A. Zhukov, Yu. S. Tchetverov
CYCLONE Central Research Institute, Moscow, Russia

I. Yu. Korovina
K. E. Ziolkovsky MATI, Moscow, Russia

G. A. Korneeva
TIPS RAS, Moscow, Russia

   The structures and properties of the thin polyimide films and coatings used as "sacrificial" layers in the technology of non cooled nitride silicon microbolometers are studied by IR and two liquids wetting methods. It is shown that the nitride microbridge materials of the admissible quality can be prepared by plasma treating of polyimide coatings.

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