Numerical modeling of the aberrations arising as a result of manufacturing defects sextupole and octupole correctors
M. O. Zotova, L. B. Rozenfel’d, B. N. Vasichev
Research Institute for Electron and Ion Optics, Moscow, Russia
The calculations methods and analysis of results of modeling the influence of tolerances on the electron-optics parameters for high-speed magnetic sextupole and octupole lens are presented. The value of the beam defects as result of the shift, the inclination and variation of the length and radius for magnetic sextupole and octupole lens are estimated.
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