No. 2 | Founded in 1994 | Moscow 2004 |
Approximation of beam’s electron energy loss in homogeneous semiconductors
M. A. Stepovich, A. A. Samokhvalov, A. G. Khokhlov, M. M. Tchaikovsky
N. E. Bauman Moscow State Technical University (Kaluga branch), Kaluga, Russia
It’s shown that modified Laguerre’s functions can be used for approximation of electron beam energy loss distribution function in semiconductors at appropriate choice of the modifying parameter.