Electron beam with homogeneous solids interaction simulation using Monte-Carlo method in discrete looses approximation
S. S. Borisov, E. A. Grachev
Physical Department, Moscow State University of M. V. Lomonosov, Moscow, Russia
S. I. Zaitsev
Institute of Problems of Microelectronic Technology, Russian Academy of Science,
Chernogolovka, Moscow region, Russia
Problems of backscattered and true-secondary spectra as far as shoot spectra simulation using discrete looses approximation are regarded in this article. Developed model allows acquiring the electron energy spectra from samples with complicated 3-d structure. Besides due to higher accuracy of the discrete looses method one can evaluate the spatial energy and accumulated charge distribution more accurately. Simulation results are compared with the experimental ones, SEM image simulation examples are given.
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