APPLIED PHYSICS

THE SCIENTIFIC AND TECHNICAL JOURNAL


No. 4 Founded in 1994 Moscow 2004


Analysis of quantity of the parasitic aberrations arising as a result of manufacturing defects toroidal magnetic deflecting systems

M. O. Zotova, L. B. Rozenfel'd, B. N. Vasichev
Research Institute for Electron and Ion Optics, Moscow, Russia

   The analysis of influence of manufacturing defects at electron-optical characteristics of the toroidal deflect systems (ТDS) was realized by trajectory calculation method. The method based at summation of the fields, created by separate conductor. The calculation of conductors field was based on law Bio-Savara. The quantitative evaluation of various defects influence on arising thereof parasitic aberrations are discussed. The most influencing defects are revealed. It is shown, that at the tolerance of 0,2 mm the size of a beam section, formed on a object, may grow at several times in comparison with ideally made system.

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