Comparative study and optimal choice of method of calculations of interstitial oxygen-in-silicon concentration from transmission spectrum data
Yu. R. Vinetski, A. G. Titov, V. I. Famitski, P. E. Khakuashev
State Scientific Center "Orion", Moscow, Russia
While developing methods of O-in-Si "mapping" with high spatial resolution, if one try to use standard measuring methods based on quasi-continual sequence of spectral samples, this leads to unrealistic time of measuring procedure. To solve the problem, alternate methods using restricted numbers of spectral samples, along with the conditions necessary for its application, are discussed. The above conditions were satisfied, the single-wave measuring method was proven to be sufficiently reproducible and accurate one.
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