Diamond films deposition under microwave plasma torch action at standard atmospheric pressure
K. F. Sergeichev, N. A. Lukina, A. P. Bolshakov, V. G. Ralchenko,
N. R. Arutiunian, S. N. Bokova, V. I. Konov
A. M. Prokhorov General Physics Institute of the Russian Academy of Science, Moscow, Russia
A diamond film synthesis was realized in argon-hydrogen-methane mixtures under action of microwave plasma torch
discharge at standard atmospheric pressure. The torch plasma parameters were defined. The plasma optical emission
spectra and Raman spectra of diamond films are shown.
PACS: 52.70.-m, 52.77.-j, 52.80.-s
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