PRIKLADNAYA FIZIKA
(Applied Physics)

The Scientific and Technical Journal

2016, No. 2 Founded in 1994. Moscow

Investigation of structural properties of the cadmium zinc telluride substrates
for mercury-cadmium-telluride epitaxy

E. V. Pryanikova1, A. E. Mirofyanchenko1, N. A. Smirnova2, A. A. Silina2, I. D. Burlakov1,
M. B. Grishechkin2, I. A. Denisov2, and N. I. Shmatov2

1 Orion R&P Association, Inc.
9 Kosinskaya str., Moscow, 111538, Russia
E-mail: pryanikova@gmail.com

2 GIREDMET, Inc.
Bld 1, 5 Bol’shoi Tolmachevsky al., Moscow, 119017, Russia
E-mail: lab27@giredmet.ru

Received March 30, 2016

Consideration is given to experimental results and analysis of structural properties of cadmium zinc tel-luride (CZT) substrates for mercury-cadmium-telluride epitaxy. These substrates have been investigated using X-ray diffraction, selective etching and infrared microscopy. A relation between rocking curve shape and full width half maximum (FHWM) with structural imperfections was demonstrated. The concentration of the at Te precipitates at level of 3×103 — 1×104 cm-2 don’t impact on FWHM. X-ray line broadening is caused by the high dislocations density (>8×105 cm-2) or cellular dislocation structure. The FWHM maps for inspection of CZT substrates were made.

PACS: 07.07.Df, 07.57. -с, 81.05.Ea, 81.65.Rv

Keywords: CZT, X-ray diffraction, MCT, FPA, structural imperfections, rocking curve.

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