APPLIED PHYSICS

THE SCIENTIFIC AND TECHNICAL JOURNAL


No. 2 Founded in 1994 Moscow 1995


THE PRINCIPLES OF HF-DISCHARGES AS CAPASITIVE OR INDUCTIVE ONES

A. F. Alexandrov, A. A. Rukhadze
General Physics Institute of Russian Academy of Sciences, Moscow. Russia

   The physical principles of high frequence gas discharges as capasitive or inductive ones based on the character of electromagnetic fields in a plasma are discussed. If the field in a plasma is almost longitudinal (potential) and it's transverse component is negJectable than the gaseous discharge can be considered as capasitive, whereas in the opposite limit when the transverse component of field dominates the gaseous discharge is inductive. Besides the high frequece discharges can be devided as resonance or nonresonance. surface or volumetric depending on the relation between the field frequence and own frequencies of sistem and the field penetration depth in a plasma.

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