Electron - beam confocal systems
B.N. Vasichev, E.P. Mikhaltsov
Moscow State Institute for Electronics and Mathematics (Technical University),
Moscow, Russia
L.B. Rosenfeld
Research Institute for Electron and Ion Optics, Moscow, Russia
Conditions of field aberrations decreasing in confocal systems, derivated by magnetic lenses are considered. Conditions of decreasing in symmetrical systems of aberrations of an isotropic and anisotropic distortion and come to zero, and in systems, derivated dy similer lenses, condition of minimization of influence of indicated aberrations are shown. A guantitative evaluation of relation of aberrations from superposition of lenses fields is spent.