D. E. Grinfeld
Moscow Physics-Technical Institute, Moscow, Russia

A.M. Filachev
Research Institute for Electron and Ion Optics, Moscow, Russia

B.I. Fuks
Institute for Radio Engineering and Electronics of RAS, Moscow, Russia

   Electron-beam processing of insulating surface is discussed. Presented is a method of maesurement of electric charge contributed into dielectric sample while e-beam irradiation. Experimental results and their discussion are given.

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