ANALYSIS OF FACTORS, INFLUENCING UPON ELECTRON BRIGHTNESS MEASUREMENT ACCURACY

L. B. Rozenfeld

Research Institute for Electron and Ion Optics, Moscow, Russia

S. Yu. Shahbazov, I. Yu. Pahomova

Moscow Institute for Electronics and Mathematics (Technical University),

Moscow, Russia

Different methods for measurement of electron brightness are discussed, and necessary formulas for calculation of methods errors are produced. It is demonstrating that the main error of lens method is result of erroneous formula usually using for calculation of aperture angle. For this reason the error of brightness value calculation can reach +100 %.