FABRICATION ACCURACY INFLUENCE UPON THE FIELD SYMMETRY OF HIGH-SPEED MAGNETIC DEFLECTING SYSTEM

L. B. Rozenfeld

Research institute for Electron and lon Optics, Moscow, Russia

B. N. Vasichev, M. O. Zotova

Moscow institute for Electronics and Mathematics (Technical University), Moscow, Russia

The methods and program product for the calculation of magnetic electronic lens aberration, caused by the unprecision of fabrication and alignment of pole pieces are presented. The channel ellipticity and the relative shift of channels in pole pieces influence on aberration coefficients and radiuses of aberration circle dispersion are estimated.