InSb 128x128 FOCAL PLANE ARRAY
V. M. Akymov, V. N. Vasilkov, I. L. Đšasatkin, E. A. Klimanov,
N. V. Kravtchenko, V. A. Morozov, A. A. Ryabova, V. F. Chyshko
The State Unitary Enterprise "RD& P Center "Orion", Moscow, Russia
Design of miniature Focal Plane Array on spectral range 3-5 Mm is described. Two-dimension photodiode detector on InSb with thin base layer was used. Indium bumps for bonding silicon readout circuitry and photodetector on InSb were used.