DEPOSITION OF THIN METAL FILMS WITH IMPROVED ADHESION

V. I. Volosov, A. G. Steshov, I. N. Churkin

Budker Institute of Nuclear Physics SB RAS, Novosibirsk, Russia

The investigations of the improving of thin metal films adhesion by the source of polyenergetic atomic fluxes are presented. The experimental results of sample treatment by polyenergetic atomic fluxes at various parameters are discussed.