SPACE DISTRIBUTION OF RECHARGE NEUTRAL PARTICLE FLOW IN THE CERA-VN DEVICE FOR MOLECULAR-BEAM EPITAXY
O. A. Babich, A. A. Balmashnov
Russian Peoples` Friendship University, Moscow, Russia
E-mail: abalmashnov@ mx.pfu.edu.ru
A short description of the microwave neutral particle flow source CERA-VN is done. Based on the experimental results the conclusion about the possibility of elastic collisions in the recharge chamber strong influence on the intensity and space divergence of created flow is made.