E. N. Pyatishev, M. S. Lurie
S.-Petersburg State Technical University, Russia

I.V. Popova, A. N. Kazakin
Company "Gyrooptics", S.-Petersburg, Russia

The differences of technological requirements upon base operations of microelectromechanical converters manufacturing and microelectronic technology are considered. The insufficiency of microelectronics means for solving micromechanical problems and the necessity of new base technology development are shown on example of a vibrational microgyroscope technological process.