Device for between-operation controls
of microphotoelectronics semi-conducter structures on capacity for work
and rejection

B. N. Vasichev, S. A. Disman
Moskow Institute Electronics and Mathematics (Technical university), Moskow, Russia

E. P. Bocharov, V. T. Savukov
Research InstitutŠµ for Electronics and ion optics, Moskow, Rissia

It is showed electron-beam metod control and analisis semi-conductor structures on capasity for work and rejection. The description of device for control of materials and wares by method of inducced current is given.

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