The analysic of efficiency of secondary
electron detectors in pair symmetre regime

B. N. Vasichev
Moscow State Institute of Electronics and Mathematics (Technical University), Russia

A. A. Melnikov
Moscow State Institute of Radioengineering, Electronics and Automation
(Technical University), Russia

O. D. Potapkin
Research Institute of Electron and Ion Optics, Moscow, Russia


Calculation of the secondary electron collection coefficient for two-detector system. The important parameter, which determines the accuracy of line-width mea- surements in electron beam technological devices is the secondary electrons collection coefficient. The problem of calculation electrostatic field in chamber with different boundary conditions is present. The secondary electron trajectories are plotted.

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