Simulation and analysis of aberrations, appearing as violation of high-speed

Simulation and analysis of aberrations,
appearing as violation of high-speed
magnetic stigmators and quadrupole lens

L. B. Rozenfeld
Research Institute for Electron and Ion Optics, Moscow, Russia

B. N. Vasichev, M. O. Zotova
Moscow Institute for Electronics and Mathematics (Technical University), Moscow, Russia

The methods a calculation and analysis of results the influence of tolerances on the electron-optics parameters for high-speed magnetic stigmators and quadrupole lens are presented. The value of the beam deflect and the quantity of the errors for positioning under the shift, the inclination and variation of the length and radius for magnetic stigmators and quadrupole lens are estimated.

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