Development of 65x1 uncooled membranе type microbolometer array

Development of 65x1 uncooled membranе type microbolometer array

V. G. Malyarov, I. A. Khrebtov, V. Yu. Zerov, Yu. V. Kulikov, I. I. Shaganov
S. I. Vavilov State Optical Institute, St.-Petersburg, Russia

A. D. Smirnov, L. S. Raguzina
"Svetlana-Electronpribor" Company, St.-Petersburg, Russia

This paper presents the structure and technology of 65-elements linear array of membrane type microbolometers, and the research results of its properties. DC biased microbolometers with VО_x thermosensitive layer have detectivity of 5·10⁷ (cm·Hz½)/W at 12,5 Hz frequency, and response time of 3 ms. The ways of improvement of developed linear array sensivity are planed.

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