Preparation of the Bi-Sr-Ca-Cu-O HTSC-films with different phase structure and various thickness by the DC magnetron sputtering method with a consequent annealing

S. V. Antonenko, K. V. Bryzgunov
Moscow State Engineering Physics Institute (Technical University), Moscow, Russia

Bi-based HTSC-films with a different phase structure and various thickness was prepared with the help of two-stage process. The influence of duration of an annealing on a phase structure of annealed films of a various thickness for films, sputtered by a method of dc magnetron sputtering on MgO <100> substrates, was investigated. It was revealed, that for films with the thickness about 2 mkm at magnification of an annealing duration the degradation of adgezion properties had been observed, while for films with a thickness about 7 mkm the magnification of an annealing duration had led to formation of a phase 2223.

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