Applied physics
No. 3, 2001

The experimental ion-assisted deposition
equipment for producing the multilayers

N.G. Elistratov, F.N. Nosyrev,
V.I. Khvesyuk, P.A Tsygankov

Bauman Moscow State Technical University, Moscow, Russia

   The scheme and parameters of the plasma technology equipment both for the stable and the metastable multilayers materiels production are described. The Al - Cr and Al - Ti compositions as the samples of various kinds of multilayers materiels were made. The investigation of the structure of the product for reacted metastable Al - Ti compositions is presented.