Applied physics
No. 3, 2001

Behaviour of the neutral gas temperature
in the HFC discharge at low air pressure

V.A. Lisovsky, E.V. Myshko
Kharkov National University, Kharkov, Ukraine

S.D. Yakovin

National Physical and Technical Center, Kharkov, Ukraine

   The inverior parameters and combustion regimes of the high-frequensy capacitive discharge to be used at handling the semiconductor materials and for pump of gas lasers have been explored in the paper.