Behaviour of the neutral gas temperature
in the HFC discharge at low air pressure
V.A. Lisovsky, E.V. Myshko
Kharkov National University, Kharkov, Ukraine
National Physical and Technical Center, Kharkov, Ukraine
The inverior parameters and combustion regimes of the high-frequensy capacitive discharge to be used at handling the semiconductor materials and for pump of gas lasers have been explored in the paper.