Applied physics
N 3, 2003

Microengine tehnology of forming the bridge structures of a microbolometric 64x64 array

A. A. Zhukov, A. E. Zlobnikov, V. V. Tarasov, Yu. S. Tchetverov
CYCLONE Central Research Institute, Moscow, Russia

   The analysis of physical and technological restrictions has been made and the microengine technology of forming the bridge structures of an uncooled microbolometric array with usage of thin polymide "sacrificed" layers of the 0,2—0,25 mm silicon nitride has been developed. Samples of bridge structures of a 64x64 avray with a 51x51 mm step are obtained. The developed technology is a basis for deriving microbolometric bars and arrays of a big format.

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