|No. 4||Founded in 1994||Moscow 2003|
Loyal metods diagnostics and equipment for control of IR-technique
B. N. Vasichev
Moscow State Institute of Electronics and Mathematicians (Technical university), Moscow, Russia
A. M. Filachov, V. P. Ponomarenko, G. I. Fatiyanova
ORION Federal Research and Production Association, Moscow, Russia
In this paper examination metods diagnose simiconductors IR-seructures in production and electron-beam equipments use for it.