Ion-optic systems for ion-beam technological equipments
B. N. Vasichev
Moscow State Institute of Electronics and Mathematicians (Technicai university), Moscow, Russia
G. I. Fatiyanova
The Research Institute for Electron and Ion Optics, Moscow, Russia
New technology be in need of new special ion-beam equipment. This ion-beam equipment must have characters corresponding new technology. Characters ion-beam equipment depend on characters ion-optic systems cus systems and the rest function elements. In this report give an count of analysis traectorys ion from ion sourses small diametr and in electrostatic focus system.
Contents