Model of near-electrode processes in magnetron spray devices
R. S. Basyrov
A. N. Tupolev Kazan State Technical University, Kazan, Russia
N. F. Kashapov, G. S. Luchkin
Kazan State Technological University, Kazan, Russia
The model of a near-cathode area for the magnetron electric discharge is offered in view of processes of secondary a.f. emmission of electrons, ionization of atoms, and a field of a bulk charge of ions. The dependence of an ionization rate on energy of electrons and electric intensity is allowed. The dependence of a current density on the cathode from parameters of the discharge (a near-cathode voltage drop, an induction of a magnetic field etc.) is obtained. The obtained results can be utilised for optimization of the fall velocity of films.
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