A creation of a homogeneous low-ionized plasma with a large volume in a high-frequency grill
I. D. Dubinova, S. S. Zhuravlyov
Sarov Physical and Technical Institute, Sarov, Nizhny Novgorod region, Russia
A device for a creation of a HF-discharge (a HF-grill) is developed, created and investigated. It represents itself a dielectric chamber, inside which two pairs parallel wire electrodes are placed and connected to a HF-generator. Measurements have shown, that formed plasma has a large volume and a high degree of uniformity in it.
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