Deposition of carbonic films from plasma of arc discharge without a cathode spot
I. S. Gasanov, I. I. Gurbanov
Institute of Photoelectronics of the Azerbaijan NAS, Baku, Republic of Azerbaijan
PVD ways of synthesis of hydrogen-free diamond-like films with high speed of a deposition of particles are analyzed. The technique of obtaining of coatings by means of a vacuum — arc discharge and of a plasma-optical filter provide the highest characteristics of a-C amorphous diamond. However, the given way of synthesis is unwieldy and requires considerable costs. The capability of creation of the reactor of carbonic plasma in discharge with electron-beam heating of the cathode is consider. The control of power, entered into the graphitic cathode, allows essentially to limit a dispersion of an evaporated material.
Contents