PRIKLADNAYA FIZIKA
(Applied Physics)
The Scientific and Technical Journal
| 2016, No. 2 | Founded in 1994. | Moscow |
Investigation of radiance processes in pulse-periodic resonant microwave plasma
V. V. Andreev, I. A. Voldiner, and M. A. KorneevaPeople’ Friendship University of Russia
6 Miklukho-Maklaya str., Moscow, 117198, Russia
E-mail: vvandreev@mail.ru
Received March 14, 2016
This work provides results of experimental investigation of spectral and photometric characteristics of visible
range radiance produced by resonant pulse-periodic microwave ECR discharge (2.45 GHz, average power up to 200 W, Argon pressure ranging
from 1×10-1 to 1×10-4 Torr) The discharge working pa-rameters lead to generation of dense
(ne = 1×1010 → 4×1011 cm-3), low temperature (Те = 3 - 5 eV)
plasma with ionization rate within 1×10-3 → 5×10-5 range. It is shown that the growth of electron
concentration at the upper limit of the pressure range with the constant level of provided power leads to a registered measurable change
in type and spectral composition of the radiance, and, furthermore, radical (over 15—20 times) increase in light flux. Simultaneous
analysis of probe and optical measurements allowed to obtain the variation range of working parameters that define the nature and parameters
of studied radiational processes.
PACS: 52.50.-Sw
Keywords: ECR discharge, spectroscopy, photometry, visible range, Langmuir probe measurements.
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