Applied physics
No. 2-3, 1997

Some problems of constructing beam modulation systems
for technological electron beam milling divicees

L.B. Rosenfeld, A.M. Filachev
Research Institute for Electron and Ion Optics, Moscow, Russia

   The properties of different types electron beam modulation systems for impulse technological divices and their stability was discussed. There are recommendations for calculation and conctruction of blanking systems for precise technological middle power devices. The recommendations for calculation and conctruction of blanking systems for precise technological middle power devices are proposed.

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