Applied physics
No. 2-3, 1997

The possibilities of high-voltage microscope SVEM-1
of research of "thick" objects

U.S. Smirnov, T.A.Grishina, I.S. Makarova
Research Institute for Electron and Ion Optics, Moscow, Russia

   The possibilities of high-voltage microscope SVEM-1 of research of "thick" objects is eleborated. SVEM-1 is allowed to work with accelerating voltage, equal 2 MV. The optimal thicknesses for the study of objects with atomic resolution is equal from 0,15 m (for heavy metals) to 0,15 m (for semiconductors). The optimal thicknesses for the study of objects in modes, using diffraction contrast and methods of electronography, is equal from 0,01 m (for heavy metals) to 1 m (for semiconductors). The optimal thicknesses of amorphous objects equal 5-10 m. Phase contrast transfer functions for high resolution objective was calculated.

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