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A high-efficiency technological line for deposition
of thin-film coatings for issue of heat-proof glass
and flat highly information colour screens
A.P. Eremin, V.D. Smoljaninov, V.V. Constantinov, A.M. Filachev
Research Institute for Electron and Ion Optics, Moscow, Russia
Offered technological Line of continuous action for deposition mono- or multiplier coatings of metals and then oxides or nitrides and also thin films high denser of silicon, nitride silicon, oxide magnum and other materials on large-sized flat substrates is inteded for issue of glass, flat highly information of color screen and other products.
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