The State Unitary Enterprise "Orion", Moscow, Russia

Institute for Radio Engineering and Electronics of Russian Academy of Sciences, Moscow, Russia

Researh Institute for Electron and fon Optics, Moscow, Russia

The physical processes taking place while electron beam processing surfaces of insulators are discussed. Particularly, the mechanisms of the introduced electric charge vanishing are examined experimentally. It was found that surface e-beam processing of some glasses is accompanied by extremely high electron emission which leads to the introduced charge rapid disappearing. This effect cannot be explained in terms of secondary electron emission.