DEVELOPMENT ON COMPUTATION TECHNIQUES AND APPLIED PROGRAM PACKAGE FOR ELECTRON BEAM TECHNOLOGICAL UNITS MODELING

Development on computation techniques and applied program package for electron beam technological units modeling
A. M. Filachev

The State Unitary Enterpris “Orion“, Moscow, Russia

S. V. Andreev, M. A. Monastyrsky, V. A. Tarasov

General Physics Institute of RAS, Moscow, Russia

I. Sh. Beluga, I. S. Gaidoukova, A. G. Muravev

Research Institute for Electron and Ion Optics, Moscow, Russia

Computer-aided design of up-to-date electron beam technological units intended for precise processing of various materials with the use of high-energetic electron beam requires sophisticated electron beam computation through all elements of a column including thermal emission electron gun, electromagnetic focusing and deflection systems. In this paper, the newly developed Applied Program Package “CHARGE” is presented, and some numerical results on electron beam technological units modeling are\ outlined and briefly discussed.