Applied Physics
N 3, 2002

The monitoring system of low energy spectrum ion beams

А. N. Kozlov, V. D. Smolyaninov, A. P. Eremin
Research Institute for Electron and Ion Optics, Moscow, Russia

А. M. Filachev
State Scientific Center “Orion”, Moscow, Russia

   Constraining reason ion technology use, is absence of control equipment important parameters of ion beams. As a result of it technological repeatability in ion processing materials is not provided. Energy of ions is the important parameter of ion beam. This work is told about the designed monitoring system and analysis of ion power spectrum. The current measurements with the help of locking potential have integrated characteristic. For reception density a current of the ions having energy, given in locking potential, we impose on this potential AC voltage. Recording part of the device allocates a variable component of ion current. The given system correctly has allowed to choose models of processing and to increase technological repeatability.

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