No. 5 | Founded in 1994 | Moscow 2003 |
Computerized diagnostic equipment for ion beam parameters measurements
I. N. Kanel, A. N. Nosirev, P. A. Tsygankov
Bauman Moscow State Technical University, Moscow, Russia
Computerized diagnostic equipment for ion beam parameters measurements is presented. Its components and algorithm of function are described. The results of analysis of ion beams from different types of ion sources for technological application are presented.