Forming the light-section 100 eV electron beams in a raster-type electron microscope
G. I. Fatyanova, Yu. V. Kulikov
ORION Research-and-Production Association, Moscow, Russia
B. N. Vasichev
The Moscow State Institute of Electronics and Mathematics (Technical University), Moscow, Russia
Given are results of examination of low-tension electron-optical systems, which form the 100-eV electron beams of light section. Two alternate versions (with inhibiting action of electrons in a backlash of a magnetic lens and with inhibiting action of electrons before an object) are considered in the article.
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