Nanostructured films obtained by low-temperature plasma
A. R. Galiaoutdinov, R. T. Galiaoutdinov, N. F. Kashapov
Academy "Kazan State Technological University", Kazan, Russia
Oxide titanium films TiOx (1 < x < 2) with variable absorption index were obtained by magnetron
sputtering method. Wavelength characteristic of the obtained thin films were measured. Films thicknesses and complex
indexs of refraction were found by spectrophotometric method. Paramag-netic ions Ti3+ were detected in
investigated coatings by method electron paramagnetic resonance. Structure of films was determined.
PACS: 81.07.-b
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