APPLIED PHYSICS

Perspectives of cubic zirconia using as micro- and photoelectronics material for photodetectors developing

A. N. Buzinin, E. E. Lomonova
A. M. Prokhorov Institute of General Physics, Russian Academy of Sciences, Moscow, Russia

N. V. Kravchenko, M. S. Sidorov, M. A. Trishenkov, A. M. Filachev, P. E. Hakuashev
Orion Research-and-Production Association, Moscow, Russia

   Cubic zirconia is a monocrystal which possessing a unique combination of physico-chemical properties. Lately there were published several researches dedicated to its using in microelectronics. The perspectives of cubic zirconia using in photoelectronics are considered hereinafter. It is shown that this material is especially usable in the technology of photodetectors on Ge, InGaAs base. Main directions of cubic zirconia using are indicated where it is used as the protective and stabilizing layer and as substrate for epitaxial layers InGaAs and also as dielectric in the structure "semiconductor on dielectric" where semiconductor is InGaAs.

PACS: 85.30.-z

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