APPLIED PHYSICS

THE SCIENTIFIC AND TECHNICAL JOURNAL


No. 2 Founded in 1994 Moscow 2009


Uncooled matrix IR detector based on optoacoustic cells and optoelectronic reading system

A. V. Gelfand, A. G. Paulish, V. N. Fedorinin
Novosibirsk Branch of Institute of Semiconductor Physics SB RAN "KTI PM", Novosibirsk, Russia

   The matrix structure 200x200 of optoacoustic cells (OAC) for uncooled IR detector with opto-electronic reading system is fabricated and investigated at the first time. Cells 100 µm in diameter shaped on ZnSe window and filled by xenon. Photosensitive layer consisted of SiO2 film with adsorption range 8—14 µm. Flexible membrane 0.15 µm of thick consisted of SiO2 and Al films. Radiation temperature sensitivity and noise equivalent power with optics f/1 were 0.15 K/Hz1/2 and 10 nW/Hz1/2, respectively, and the thermal response time was below 30 ms.

PACS: 85.60.-q; 85.85.+j

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