APPLIED PHYSICSTHE SCIENTIFIC AND TECHNICAL JOURNAL
Uncooled matrix IR detector based on optoacoustic cells and optoelectronic reading system A. V. Gelfand, A. G. Paulish, V. N. Fedorinin
The matrix structure 200x200 of optoacoustic cells (OAC) for uncooled IR detector with opto-electronic
reading system is fabricated and investigated at the first time. Cells 100 µm in diameter shaped on ZnSe
window and filled by xenon. Photosensitive layer consisted of SiO2 film with adsorption range 8—14 µm.
Flexible membrane 0.15 µm of thick consisted of SiO2 and Al films. Radiation temperature sensitivity
and noise equivalent power with optics f/1 were 0.15 K/Hz1/2 and
10 nW/Hz1/2, respectively, and the thermal response time was below 30 ms.
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