|
Filachev A. M. The fourth All-Russia seminar "Problems of theoretical and applied electron optics"
| 5 |
| Vasichev B. N., Filachev A. M. Electron and ion optics and electron- and ion-beam equipment in State research institute for electron
and ion optics (It is 25 old)
| 7 |
| Vasichev B. N. Special feature complex equipment for electron-beam microlitografy
| 26 |
| Vasichev B. N., Disman S. A., Bocharov E. P., Savukov V. T. Device for between-operation controls of microphotoelectronics semi-
conducter structures on capacity for work and rejection
| 47 |
| Vasichev B. N., Chernova-Stoljarova E. E., Rosenfeld L. B. Device for the in-process checks behind surface quality of substructures
and thin films of microstructures of microelectronic wares in manufacturing process | 58 |
| Vasichev B. N. Management information electron-beam wave fields in electron-beam calculators and electron microscope
| 67 |
| Andreev S. V., Monastyrski M. A., Tarasov V. A., Murav'ev A. G. The software development for computer modeling of electron guns
with arbitrary-shaped cathode
| 77 |
| Perevodchikov V. I., Shapenko V. N., Martynov V. F., Stalkov P. М., Shapiro A. L. New type of high-power switching electron tubes
— electron-beam valves
| 86 |
| Korotaev Yu. V., Meshkov I. N., Petrov A. L., Sidorin A. O., Smirnov A. V., Syresin E. M. Space charge effects in the intense electron
beams related to the electron cooling systems
| 95 |
| Morozov A. I., Balebanov V. M., Bugrova A. I., Lipatov A. S., Khartchevnikov V. K. SPT as focusing plasma system with surface
dominant discharge
| 106 |
| Eremin A. P., Smolyaninov V. D., Filachev A. M. Ionic atomizer with counter-arranged targets
| 118 |
|
Zavjalov M. A., Perevodchikov V. I., Syrovoy V. A. Problems of election-optical systems for perspective beam-plasma microwave
devices
| 122 |
| Pyatishev E. N., Lurie M. S., Popova I. V., Kazakin A. N. Some specific features of MEMS technology and devices | 133 |
| Abdulmanov V. G., Korotkova V. L., Maslennikov O. Yu., Nevski P. V., Rybachek V. P., Fedyaev V. K. Election-optical system of
multicharged ions, MIS-1 | 138 |
| Abdulmanov V. G., Dementev E. N., Mginskya E. G., Mironenko L. A., Pirogov O. V., Tomi-lov V. P., Tzukanov V. M. Electron
radiant of multicharged ions, IMI-2 | 144 |
| Matyshev A. A. On space-time aberration and its possible applications in corpuscular optics
| 149 |
| Matyshev A. A. Isotrajectory dynamics as a new branch of corpuscular optics
| 155 |
| Matyshev A. A. On the isotrajectory lateral differential invariant
| 161 |
| Kulikov Yu. V., Pryasnishnikov I. G., Tarasov V. A. Experience of computer designing of election-optical system of the streak tube
with magnetically focused of the image
| 165 |
| Melnik V. I., Melnik I. V., Porytsky P. V. Numerical simulation of the technological process of the deposition of thin films in gas-
discharge electron beam evaporation | 168 |
| Melnik V. I., Melnik I. V. Investigation of high voltage glow discharge electrode's systems optic by using an image analyzing
computer method | 173 |
Contents of the journal down to 1997